X-Theta Air Bearing Stage

Ultra-Smooth Motorized Rotary & Linear Motion -- Ideal for Wafer Scanning!

ABTech inc's X-Theta stage combines ultra-precision rotary and linear air bearings with DC brushless motors and high resolution non-contact encoders to produce the ultimate smooth moving stage. Ideally suited for wafer scanning machine applications.

These stages are designed for cleanroom environments, incorporating appropriate materials, parts cleaning and captured exhaust. This feature allows the air bearing exhaust to be drawn to a common port, where a vacuum supply can be connected to take the exhaust flow away from the work area. This is critical in some applications where particle flow around work surfaces may cause contamination.

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The X-axis stage is based on ABTech's MLAB 7750 series air bearing linear slides with modifications to materials and contained exhaust feature. The Theta or rotary axis is a custom 150 mm diameter air bearing rotary spin table with a DC brushless motor integrally built into the lower thrust plate. The theta air bearing exhaust is also captured and coupled with the X-axis exhaust port. The table is fitted with a 216 mm diameter intermediate vacuum chuck adapter. A vacuum can be connected to the side of the Theta axis where the vacuum is ported through the stage and jumps an air gap to get through to the chuck adapter. No rotary unions are required.

Features:

  • X-axis: magnetically preloaded linear air bearing (MLAB7750)
  • Theta axis: fully constrained rotary air bearing (AT150/200-DD)
  • Contained exhaust feature
  • Cleanroom compatible
  • Ultra-smooth motion, no static friction
  • Linear & rotary DC brushless motors
  • High resolution encoders
  • Total non-contact component design - "no parts to wear"
  • Intermediate vacuum chuck worktable with internal porting
  • Low air consumption
  • Custom tooling and fixturing design and manufacturing
  • Turn-key systems available for O.E.M.s
  • Brush ring available for electrical grounding of rotating components

 

Don't see what you need? ABTech welcomes the opportunity to meet your unique motion challenges. We have a successful track record for high quality custom design and manufacturing of air bearing, oil hydrostatic, and mechanical bearing systems for the most challenging motion and geometry applications. Contact us today so we can provide you with a solution to your demanding precision motion applications!

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ABTech, Inc. • PO Box 10296 • 126 Monadnock Highway • Swanzey, NH USA 03446
info@abtechmfg.com • Tel: 603-358-6431 • Fax: 603-358-0196